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Spatial distributions of the absolute CF and radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation
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10.1116/1.1376708
/content/avs/journal/jvsta/19/5/10.1116/1.1376708
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1376708
/content/avs/journal/jvsta/19/5/10.1116/1.1376708
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/content/avs/journal/jvsta/19/5/10.1116/1.1376708
2001-09-01
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spatial distributions of the absolute CF and CF2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1376708
10.1116/1.1376708
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