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Fluorinated amorphous carbon thin films: Analysis of the role of the plasma source frequency on the structural and optical properties
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10.1116/1.1378071
/content/avs/journal/jvsta/19/5/10.1116/1.1378071
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1378071
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/content/avs/journal/jvsta/19/5/10.1116/1.1378071
2001-09-01
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fluorinated amorphous carbon thin films: Analysis of the role of the plasma source frequency on the structural and optical properties
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1378071
10.1116/1.1378071
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