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Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. pulsed plasmas
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10.1116/1.1434965
/content/avs/journal/jvsta/20/2/10.1116/1.1434965
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/2/10.1116/1.1434965
/content/avs/journal/jvsta/20/2/10.1116/1.1434965
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/content/avs/journal/jvsta/20/2/10.1116/1.1434965
2002-03-01
2015-03-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl2 pulsed plasmas
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/2/10.1116/1.1434965
10.1116/1.1434965
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