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Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)
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10.1116/1.1458944
/content/avs/journal/jvsta/20/3/10.1116/1.1458944
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1458944
/content/avs/journal/jvsta/20/3/10.1116/1.1458944
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/content/avs/journal/jvsta/20/3/10.1116/1.1458944
2002-05-07
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1458944
10.1116/1.1458944
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