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Alternating stress field and superhardness effect in TiN/NbN superlattice films
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10.1116/1.1460887
/content/avs/journal/jvsta/20/3/10.1116/1.1460887
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1460887
/content/avs/journal/jvsta/20/3/10.1116/1.1460887
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/content/avs/journal/jvsta/20/3/10.1116/1.1460887
2002-05-07
2015-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Alternating stress field and superhardness effect in TiN/NbN superlattice films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1460887
10.1116/1.1460887
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