1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of
Rent:
Rent this article for
USD
10.1116/1.1474419
/content/avs/journal/jvsta/20/3/10.1116/1.1474419
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1474419
/content/avs/journal/jvsta/20/3/10.1116/1.1474419
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvsta/20/3/10.1116/1.1474419
2002-05-07
2014-12-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO2
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/20/3/10.1116/1.1474419
10.1116/1.1474419
SEARCH_EXPAND_ITEM