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Effects of Si addition on the microstructural evolution and hardness of Ti–Al–Si–N films prepared by the hybrid system of arc ion plating and sputtering techniques
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10.1116/1.1576765
/content/avs/journal/jvsta/21/4/10.1116/1.1576765
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/4/10.1116/1.1576765
/content/avs/journal/jvsta/21/4/10.1116/1.1576765
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/content/avs/journal/jvsta/21/4/10.1116/1.1576765
2003-05-16
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of Si addition on the microstructural evolution and hardness of Ti–Al–Si–N films prepared by the hybrid system of arc ion plating and sputtering techniques
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/4/10.1116/1.1576765
10.1116/1.1576765
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