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Oxygenated polymeric thin films deposited from toluene and oxygen by remote plasma enhanced chemical vapor deposition
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10.1116/1.1597891
/content/avs/journal/jvsta/21/5/10.1116/1.1597891
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/5/10.1116/1.1597891
/content/avs/journal/jvsta/21/5/10.1116/1.1597891
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/content/avs/journal/jvsta/21/5/10.1116/1.1597891
2003-07-24
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxygenated polymeric thin films deposited from toluene and oxygen by remote plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/5/10.1116/1.1597891
10.1116/1.1597891
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