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Control of pressure rise in a vacuum chamber by boron nitride and copper composite coating
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10.1116/1.1615971
/content/avs/journal/jvsta/21/6/10.1116/1.1615971
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/6/10.1116/1.1615971
/content/avs/journal/jvsta/21/6/10.1116/1.1615971
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/content/avs/journal/jvsta/21/6/10.1116/1.1615971
2003-10-01
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Control of pressure rise in a vacuum chamber by boron nitride and copper composite coating
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/21/6/10.1116/1.1615971
10.1116/1.1615971
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