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Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor I: Deposition, morphology, structural and chemical properties
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10.1116/1.1624284
/content/avs/journal/jvsta/22/1/10.1116/1.1624284
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/1/10.1116/1.1624284
/content/avs/journal/jvsta/22/1/10.1116/1.1624284
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/content/avs/journal/jvsta/22/1/10.1116/1.1624284
2003-11-13
2014-07-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C8F18) vapor I: Deposition, morphology, structural and chemical properties
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/1/10.1116/1.1624284
10.1116/1.1624284
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