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Temperature-resolved Fourier transform infrared study of condensation reactions and porogen decomposition in hybrid organosilicon-porogen films
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10.1116/1.1627766
/content/avs/journal/jvsta/22/1/10.1116/1.1627766
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/1/10.1116/1.1627766
/content/avs/journal/jvsta/22/1/10.1116/1.1627766
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/content/avs/journal/jvsta/22/1/10.1116/1.1627766
2003-11-25
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Temperature-resolved Fourier transform infrared study of condensation reactions and porogen decomposition in hybrid organosilicon-porogen films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/1/10.1116/1.1627766
10.1116/1.1627766
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