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Thickness dependence of the properties of highly c-axis textured AlN thin films
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10.1116/1.1649343
/content/avs/journal/jvsta/22/2/10.1116/1.1649343
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/2/10.1116/1.1649343
/content/avs/journal/jvsta/22/2/10.1116/1.1649343
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/content/avs/journal/jvsta/22/2/10.1116/1.1649343
2004-02-12
2015-05-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thickness dependence of the properties of highly c-axis textured AlN thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/2/10.1116/1.1649343
10.1116/1.1649343
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