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Effects of thermal annealing of multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes
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10.1116/1.1690248
/content/avs/journal/jvsta/22/3/10.1116/1.1690248
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/3/10.1116/1.1690248
/content/avs/journal/jvsta/22/3/10.1116/1.1690248
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/content/avs/journal/jvsta/22/3/10.1116/1.1690248
2004-04-05
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/3/10.1116/1.1690248
10.1116/1.1690248
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