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Effects of atomic hydrogen on the selective area growth of Si and thin films on Si and surfaces: Inhibition, nucleation, and growth
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10.1116/1.1699336
/content/avs/journal/jvsta/22/3/10.1116/1.1699336
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/3/10.1116/1.1699336
/content/avs/journal/jvsta/22/3/10.1116/1.1699336
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/content/avs/journal/jvsta/22/3/10.1116/1.1699336
2004-04-27
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of atomic hydrogen on the selective area growth of Si and Si1−xGex thin films on Si and SiO2 surfaces: Inhibition, nucleation, and growth
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/3/10.1116/1.1699336
10.1116/1.1699336
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