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Anneal behavior of reactively sputtered HfN films
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10.1116/1.1705642
/content/avs/journal/jvsta/22/4/10.1116/1.1705642
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1705642
/content/avs/journal/jvsta/22/4/10.1116/1.1705642
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/content/avs/journal/jvsta/22/4/10.1116/1.1705642
2004-07-22
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anneal behavior of reactively sputtered HfN films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1705642
10.1116/1.1705642
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