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Effect of low substrate deposition temperature on the optical and electrical properties of doped ZnO films fabricated by ion beam sputter deposition
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10.1116/1.1738654
/content/avs/journal/jvsta/22/4/10.1116/1.1738654
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1738654
/content/avs/journal/jvsta/22/4/10.1116/1.1738654
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/content/avs/journal/jvsta/22/4/10.1116/1.1738654
2004-06-15
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of low substrate deposition temperature on the optical and electrical properties of Al2O3 doped ZnO films fabricated by ion beam sputter deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1738654
10.1116/1.1738654
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