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Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics
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10.1116/1.1764815
/content/avs/journal/jvsta/22/4/10.1116/1.1764815
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1764815
/content/avs/journal/jvsta/22/4/10.1116/1.1764815
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/content/avs/journal/jvsta/22/4/10.1116/1.1764815
2004-07-20
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/4/10.1116/1.1764815
10.1116/1.1764815
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