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Ion effects on surface interactions during and plasma processing of a)
a)No proof corrections received from author prior to publication.
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10.1116/1.1781180
/content/avs/journal/jvsta/22/5/10.1116/1.1781180
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/5/10.1116/1.1781180
/content/avs/journal/jvsta/22/5/10.1116/1.1781180
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/content/avs/journal/jvsta/22/5/10.1116/1.1781180
2004-09-24
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion effects on CF2 surface interactions during C3F8 and C4F8 plasma processing of Sia)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/5/10.1116/1.1781180
10.1116/1.1781180
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