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Evolution of local texture and grain morphology in metal plasma immersion ion implantation & deposition of TiN
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10.1116/1.1795828
/content/avs/journal/jvsta/22/6/10.1116/1.1795828
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/6/10.1116/1.1795828
/content/avs/journal/jvsta/22/6/10.1116/1.1795828
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/content/avs/journal/jvsta/22/6/10.1116/1.1795828
2004-10-20
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of local texture and grain morphology in metal plasma immersion ion implantation & deposition of TiN
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/6/10.1116/1.1795828
10.1116/1.1795828
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