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Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition
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10.1116/1.1795833
/content/avs/journal/jvsta/22/6/10.1116/1.1795833
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/6/10.1116/1.1795833
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Hydrogen and fluorine contents as functions of the annealing temperature. The lines are only to guide the eyes.

Image of FIG. 2.
FIG. 2.

Film atomic density as a function of the annealing temperatures. The line is only to guide the eyes.

Image of FIG. 3.
FIG. 3.

XPS spectra obtained from a sample annealed at (a) and at (b). The figure also shows the simulated spectra by using Voigt peaks and the Shirley background. Arrows indicate the positions of the main features of these spectra.

Image of FIG. 4.
FIG. 4.

Raman spectra obtained from the as-deposited and annealed samples.

Image of FIG. 5.
FIG. 5.

(a) -band width; (b) -band position, and (c) as functions of the annealing temperatures.

Image of FIG. 6.
FIG. 6.

Contact angle as a function of the annealing temperature. The line is only to guide the eyes.

Image of FIG. 7.
FIG. 7.

AFM images obtained from a-C:F films annealed at two different temperatures, as indicated.

Image of FIG. 8.
FIG. 8.

RMS roughness as a function of the annealing temperature.

Image of FIG. 9.
FIG. 9.

(a) Adhesion forces and (b) friction coefficient as functions of the annealing temperature.

Image of FIG. 10.
FIG. 10.

Compressive internal stress as a function of the temperature. The line is only to guide the eyes.

Image of FIG. 11.
FIG. 11.

Film hardness a function of the temperature. The line is only to guide the eyes.

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/content/avs/journal/jvsta/22/6/10.1116/1.1795833
2004-10-20
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/22/6/10.1116/1.1795833
10.1116/1.1795833
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