Growth of heteroepitaxial ZnO thin film and nanomultilayer by off-axis rf magnetron sputtering
Effect of deposition pressure on HRXRD rocking curve FWHM of ZnO thin film on sapphire (001) substrate grown at and (inset; substrate temperature of ).
FE-SEM surface morphology of heteroepitaxial ZnO thin films grown at and ; (a) 5, (b) 10, (c) 20, and (d) (inset; cross section).
AFM surface morphology of thick ZnO thin film on sapphire grown at , , and .
HRXRD phi-scan of heteroepitaxial ZnO thin film on sapphire (001) substrate grown at , , and .
PL spectra of as-deposited ZnO thin film on sapphire grown at , , and ; Measuring temperature of (a) and (b) RT.
Effect of postannealing temperature on the HRXRD rocking curve FWHM of ZnO thin film grown at , , and .
Low-temperature PL spectra of nanomultilayer with well layer thickness of (a) 120 and (b) , and (c) thin film (All layers were grown at , , and ) (inset: Plot of the peak energy of (Mg,Zn)O against Mg content—see Ref. 19).
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