1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Growth of heteroepitaxial ZnO thin film and nanomultilayer by off-axis rf magnetron sputtering
Rent:
Rent this article for
USD
10.1116/1.1814105
    + View Affiliations - Hide Affiliations
    Affiliations:
    1 Thin Film Materials Research Center, Korea Institute of Science and Technology, 39-1 Hawolgok-dong, Seongbuk-gu, Seoul 136-791, Korea
    2 Department of Optical Engineering, Inje University, Kyongnam 621-749, Korea
    3 Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
    4 Department of Optical Engineering, Inje University, Kyongnam 621-749, Korea
    5 Thin Film Materials Research Center, Korea Institute of Science and Technology, 39-1 Hawolgok-dong, Seongbuk-gu, Seoul 136-791, Korea
    a) Also at: Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea.
    b) Author to whom correspondence should be addressed; electronic mail: jkleemc@kist.re.kr
    J. Vac. Sci. Technol. A 23, 1 (2005); http://dx.doi.org/10.1116/1.1814105
/content/avs/journal/jvsta/23/1/10.1116/1.1814105
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/1/10.1116/1.1814105
/content/avs/journal/jvsta/23/1/10.1116/1.1814105
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvsta/23/1/10.1116/1.1814105
2004-11-15
2014-10-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth of heteroepitaxial ZnO thin film and ZnO∕(Mg,Zn)O nanomultilayer by off-axis rf magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/1/10.1116/1.1814105
10.1116/1.1814105
SEARCH_EXPAND_ITEM