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Effect of nitrogen pressure on the hardness and chemical states of TiAlCrN coatings
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10.1116/1.1830498
    + View Affiliations - Hide Affiliations
    Affiliations:
    1 Department of Chemical Engineering, The University of Alabama, Box 870203, Tuscaloosa, Alabama 35487-0203
    2 Department of Metallurgical and Materials Engineering, The University of Alabama, Box 870202, Tuscaloosa, Alabama 35487-0202
    3 Department of Materials Science and Engineering, University of Pittsburgh, 848 Benedum Engineering Hall, Pittsburgh, Pennsylvania 15261-2208
    4 Department of Metallurgical and Materials Engineering, The University of Alabama, Box 870202, Tuscaloosa, Alabama 35487-0202
    a) Author to whom correspondence should be addressed; electronic mail: mweaver@coe.eng.ua.edu
    J. Vac. Sci. Technol. A 23, 78 (2005); http://dx.doi.org/10.1116/1.1830498
/content/avs/journal/jvsta/23/1/10.1116/1.1830498
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/1/10.1116/1.1830498

Figures

Image of FIG. 1.
FIG. 1.

Deposition rate as a function of .

Image of FIG. 2.
FIG. 2.

Amounts of nitrogen in the film and in the flow as a function of .

Image of FIG. 3.
FIG. 3.

Relative amounts of metals in the coatings as a function of .

Image of FIG. 4.
FIG. 4.

Hardness and reduced modulus as a function of .

Image of FIG. 5.
FIG. 5.

Evolution of Al XPS spectra as increases. The binding energies corresponding to AlN and pure Al were shown for comparison.

Image of FIG. 6.
FIG. 6.

Evolution of Ti XPS spectra as increases. The binding energies corresponding to TiN and pure Ti were shown for comparison.

Image of FIG. 7.
FIG. 7.

Deconvolution of Ti spectra for (a) and (b) , respectively.

Image of FIG. 8.
FIG. 8.

Evolution of the Cr XPS spectra as increases. The binding energies corresponding to CrN and pure Cr were shown for comparison.

Image of FIG. 9.
FIG. 9.

Difference between Cr XPS spectra for and 0.

Tables

Generic image for table
TABLE I.

Negative heat of formation for selected nitrides and oxides of Ti, Al, and Cr (in units of kJ per mole of gas atom at ) (Ref. 29).

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2004-12-02
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of nitrogen pressure on the hardness and chemical states of TiAlCrN coatings
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/1/10.1116/1.1830498
10.1116/1.1830498
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