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Effect of nitrogen pressure on the hardness and chemical states of TiAlCrN coatings
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10.1116/1.1830498
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    Affiliations:
    1 Department of Chemical Engineering, The University of Alabama, Box 870203, Tuscaloosa, Alabama 35487-0203
    2 Department of Metallurgical and Materials Engineering, The University of Alabama, Box 870202, Tuscaloosa, Alabama 35487-0202
    3 Department of Materials Science and Engineering, University of Pittsburgh, 848 Benedum Engineering Hall, Pittsburgh, Pennsylvania 15261-2208
    4 Department of Metallurgical and Materials Engineering, The University of Alabama, Box 870202, Tuscaloosa, Alabama 35487-0202
    a) Author to whom correspondence should be addressed; electronic mail: mweaver@coe.eng.ua.edu
    J. Vac. Sci. Technol. A 23, 78 (2005); http://dx.doi.org/10.1116/1.1830498
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/content/avs/journal/jvsta/23/1/10.1116/1.1830498
2004-12-02
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of nitrogen pressure on the hardness and chemical states of TiAlCrN coatings
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/1/10.1116/1.1830498
10.1116/1.1830498
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