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Vacuum microelectronic devices and vacuum requirements
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10.1116/1.1885019
/content/avs/journal/jvsta/23/4/10.1116/1.1885019
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1885019
/content/avs/journal/jvsta/23/4/10.1116/1.1885019
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/content/avs/journal/jvsta/23/4/10.1116/1.1885019
2005-06-28
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Vacuum microelectronic devices and vacuum requirements
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1885019
10.1116/1.1885019
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