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Tribological and wear studies of coatings fabricated by atomic layer deposition and by successive ionic layer adsorption and reaction for microelectromechanical devices
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10.1116/1.1885022
/content/avs/journal/jvsta/23/4/10.1116/1.1885022
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1885022
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SOI-based thermally actuated friction microtester.

Image of FIG. 2.
FIG. 2.

Wave forms applied on (a) upper bent beam actuator and (b) lower bent beam actuator.

Image of FIG. 3.
FIG. 3.

Typical friction force and normal force during sliding.

Image of FIG. 4.
FIG. 4.

Coefficient of friction versus humidity for ALD coated devices and native coated devices.

Image of FIG. 5.
FIG. 5.

Coefficient of friction versus pressure for ALD coatings.

Image of FIG. 6.
FIG. 6.

Coefficient of friction versus pressure for SILAR coatings.

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/content/avs/journal/jvsta/23/4/10.1116/1.1885022
2005-06-24
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tribological and wear studies of coatings fabricated by atomic layer deposition and by successive ionic layer adsorption and reaction for microelectromechanical devices
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1885022
10.1116/1.1885022
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