X-ray diffraction patterns of thin films at different compositions .
Lattice parameters as a function of the composition in the thin films.
SAED patterns from thin films compared with ZrN: (a) and (b) .
Bright field cross-sectional TEM images of (a) ZrN, (c) , and (e) . Dark-field images of (b) ZrN, (d) , and (f) thin films.
Nanohardness and Young’s modulus as a function of the aluminum (a) and chromium (b) concentration in the and thin films, respectively.
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