Enlargement of grain in poly-Si by adding Au in Ni-mediated crystallization of amorphous Si using a cap layer
Schematic diagram of structures for metal mediated crystallization. The metal is Ni (a), Ni–Au (b), and Au (c).
SEM images of the poly-Si films using various Au densities with a fixed Ni density of . The Au density was 0 (a), (b), (c), (d), and (e).
EBSD orientation mapping images to the surface normal direction (a), (c) and their inverse pole figures (b), (d) for the poly-Si films crystallized with a fixed Ni density of . The Au density was 0 (a), (b) and (c), (d).
Number of grain (a) and average grain size (b) in the poly-Si films as a function of ratio.
SIMS depth profile (a) and a schematic representation of Ni and Au diffusion behavior for crystallization (b).
Article metrics loading...
Full text loading...