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Enlargement of grain in poly-Si by adding Au in Ni-mediated crystallization of amorphous Si using a cap layer
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10.1116/1.1924581
/content/avs/journal/jvsta/23/4/10.1116/1.1924581
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1924581
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of structures for metal mediated crystallization. The metal is Ni (a), Ni–Au (b), and Au (c).

Image of FIG. 2.
FIG. 2.

SEM images of the poly-Si films using various Au densities with a fixed Ni density of . The Au density was 0 (a), (b), (c), (d), and (e).

Image of FIG. 3.
FIG. 3.

EBSD orientation mapping images to the surface normal direction (a), (c) and their inverse pole figures (b), (d) for the poly-Si films crystallized with a fixed Ni density of . The Au density was 0 (a), (b) and (c), (d).

Image of FIG. 4.
FIG. 4.

Number of grain (a) and average grain size (b) in the poly-Si films as a function of ratio.

Image of FIG. 5.
FIG. 5.

SIMS depth profile (a) and a schematic representation of Ni and Au diffusion behavior for crystallization (b).

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/content/avs/journal/jvsta/23/4/10.1116/1.1924581
2005-06-07
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enlargement of grain in poly-Si by adding Au in Ni-mediated crystallization of amorphous Si using a SiNx cap layer
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/4/10.1116/1.1924581
10.1116/1.1924581
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