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Dry-etch of thin films for optical waveguide fabrication
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10.1116/1.2049308
/content/avs/journal/jvsta/23/6/10.1116/1.2049308
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/6/10.1116/1.2049308
/content/avs/journal/jvsta/23/6/10.1116/1.2049308
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/content/avs/journal/jvsta/23/6/10.1116/1.2049308
2005-10-24
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dry-etch of As2S3 thin films for optical waveguide fabrication
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/6/10.1116/1.2049308
10.1116/1.2049308
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