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Interplay of hydrogen and deposition temperature in optical properties of hot-wire deposited Films: Ex situ spectroscopic ellipsometry studies
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10.1116/1.2056552
/content/avs/journal/jvsta/23/6/10.1116/1.2056552
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/6/10.1116/1.2056552
/content/avs/journal/jvsta/23/6/10.1116/1.2056552
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/content/avs/journal/jvsta/23/6/10.1116/1.2056552
2005-10-25
2015-05-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interplay of hydrogen and deposition temperature in optical properties of hot-wire deposited a‐Si:H Films: Ex situ spectroscopic ellipsometry studies
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/23/6/10.1116/1.2056552
10.1116/1.2056552
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