Dependence of sheet resistance variation on annealing temperature for (a) , and (b) .
XRD spectra for annealed at different temperatures (a) not annealed to annealed at , (b) 450 to , (c) 700 to .
XRD spectra for samples of annealed at (a) and (b) .
Depth profiling Auger electron spectroscopy for samples annealed at (a) , (b) , (c) , and (d) for .
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