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Ion-surface interactions on at the radiofrequency-powered electrode in low-pressure plasmas: Ex situ spectroscopic ellipsometry and Monte Carlo simulation study
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10.1116/1.2134709
/content/avs/journal/jvsta/24/1/10.1116/1.2134709
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/1/10.1116/1.2134709
/content/avs/journal/jvsta/24/1/10.1116/1.2134709
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/content/avs/journal/jvsta/24/1/10.1116/1.2134709
2005-12-09
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas: Ex situ spectroscopic ellipsometry and Monte Carlo simulation study
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/1/10.1116/1.2134709
10.1116/1.2134709
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