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Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries
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10.1116/1.2150230
/content/avs/journal/jvsta/24/2/10.1116/1.2150230
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/2/10.1116/1.2150230
/content/avs/journal/jvsta/24/2/10.1116/1.2150230
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/content/avs/journal/jvsta/24/2/10.1116/1.2150230
2006-02-08
2015-03-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/2/10.1116/1.2150230
10.1116/1.2150230
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