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Compositional effect on the dielectric properties of high- titanium silicate thin films deposited by means of a cosputtering process
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10.1116/1.2180267
/content/avs/journal/jvsta/24/3/10.1116/1.2180267
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/3/10.1116/1.2180267
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Variation of the content of the cosputtered deposited films as a function of the power applied on the and the targets.

Image of FIG. 2.
FIG. 2.

Effect of the composition of the cosputtered thin films on (a) the high-resolution XPS spectra of the O , Si , and Ti core levels and on (b) the region of the FTIR absorbance spectra. The inset shows the variation of the Ti–O–Si peak intensity with the composition of the films.

Image of FIG. 3.
FIG. 3.

Density of the cosputtered thin films, as determined from XRR measurements, as a function of their composition. Literature density values for thermal (Ref. 24) and anatase are also shown on the graph. The inset shows a typical XRR curve for a cosputtered film deposited on Si with its corresponding simulated spectrum.

Image of FIG. 4.
FIG. 4.

Refractive index (at wavelength) and optical band gap variations with the composition of the cosputtered thin films.

Image of FIG. 5.
FIG. 5.

Dielectric constant of the cosputtered thin films as a function of their composition. The inset shows typical dielectric constant and dissipation factor vs frequency curves (in the case of film).

Image of FIG. 6.
FIG. 6.

Leakage current density vs electric field curves for cosputtered thin films with various compositions. The inset shows the composition dependence of the soft breakdown field of the cosputtered films.

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/content/avs/journal/jvsta/24/3/10.1116/1.2180267
2006-05-04
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Compositional effect on the dielectric properties of high-k titanium silicate thin films deposited by means of a cosputtering process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/3/10.1116/1.2180267
10.1116/1.2180267
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