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Comment on “Nanoscale fatigue and fracture toughness measurement of multilayered thin film structures for digital micromirror devices” [J. Vac. Sci. Technol. A22, 1397 (2004)]
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10.1116/1.2207151
/content/avs/journal/jvsta/24/4/10.1116/1.2207151
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/4/10.1116/1.2207151
/content/avs/journal/jvsta/24/4/10.1116/1.2207151
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/content/avs/journal/jvsta/24/4/10.1116/1.2207151
2006-06-20
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comment on “Nanoscale fatigue and fracture toughness measurement of multilayered thin film structures for digital micromirror devices” [J. Vac. Sci. Technol. A22, 1397 (2004)]
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/4/10.1116/1.2207151
10.1116/1.2207151
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