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Measurement of Cu atom density in a magnetron sputtering plasma source using an YBaCuO target by laser-induced fluorescence imaging spectroscopy
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10.1116/1.2353850
/content/avs/journal/jvsta/24/6/10.1116/1.2353850
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2353850
/content/avs/journal/jvsta/24/6/10.1116/1.2353850
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/content/avs/journal/jvsta/24/6/10.1116/1.2353850
2006-10-11
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of Cu atom density in a magnetron sputtering plasma source using an YBaCuO target by laser-induced fluorescence imaging spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2353850
10.1116/1.2353850
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