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Thin film deposition of barium strontium oxide by rf magnetron sputtering
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10.1116/1.2363400
/content/avs/journal/jvsta/24/6/10.1116/1.2363400
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2363400

Figures

Image of FIG. 1.
FIG. 1.

SEM micrographs of as-deposited (BaSr)O films on tungsten at substrate temperatures of [(a) and (b)] , (c) , and (d) .

Image of FIG. 2.
FIG. 2.

Chemical composition of an as-deposited (BaSr)O film by EDS analysis.

Image of FIG. 3.
FIG. 3.

plots of (BaSr)O films deposited at substrate temperatures of (a) , (b) , and (c) .

Image of FIG. 4.
FIG. 4.

Schottky plots of (BaSr)O films deposited at substrate temperatures of (a) , (b) , and (c) , and (d) the corresponding Richardson plots.

Tables

Generic image for table
TABLE I.

Thermionic emission current densities at various cathode temperatures from (BaSr)O films deposited at substrate temperatures of 25, 400, and .

Generic image for table
TABLE II.

Work functions and emission coefficients of (BaSr)O films deposited at substrate temperatures of 25, 400, and .

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/content/avs/journal/jvsta/24/6/10.1116/1.2363400
2006-10-20
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thin film deposition of barium strontium oxide by rf magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2363400
10.1116/1.2363400
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