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Measurement of desorbed products during organic polymer thin film etching by plasma beam irradiation
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10.1116/1.2364000
/content/avs/journal/jvsta/24/6/10.1116/1.2364000
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2364000

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of plasma beam irradiation apparatus.

Image of FIG. 2.
FIG. 2.

Molecular formula of the samples. PtBuMA, PCHMA, and PBMA can be expressed also as , where is , , and , respectively.

Image of FIG. 3.
FIG. 3.

TOF distribution of HCN . The energy of the nitrogen ion was .

Image of FIG. 4.
FIG. 4.

Deconvolution of TOF distribution. The temperature of MB distribution was and the atomic mass unit was 27. Each deconvoluted spectrum corresponds to the pulse width of the plasma beam.

Image of FIG. 5.
FIG. 5.

Dependence of desorbed product temperature on TOF distribution.

Image of FIG. 6.
FIG. 6.

Dependence of surface binding energy of desorbed products on TOF distribution.

Image of FIG. 7.
FIG. 7.

Dependence of the ratio of CC to of desorbed products on TOF distribution.

Image of FIG. 8.
FIG. 8.

Example of TOF distribution fitting for the pulse time of . Experimental and calculated data are represented by the gray line and the dashed line, respectively.

Image of FIG. 9.
FIG. 9.

TOF distribution of .

Image of FIG. 10.
FIG. 10.

Ion energy dependence of EY with plasma beam irradiation.

Image of FIG. 11.
FIG. 11.

TOF distribution of HCN from PCHMA at the ion energies of 180 and . The base line was moved up to higher ion energy for visualization of distributions.

Image of FIG. 12.
FIG. 12.

TOF distribution of HCN from PtBuMA at the ion energies of 180 and . The base line was moved up to higher ion energy for visualization of distributions.

Tables

Generic image for table
TABLE I.

List of desorbed products.

Generic image for table
TABLE II.

Results of TOF distribution analysis at the ion energies of 180 and .

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/content/avs/journal/jvsta/24/6/10.1116/1.2364000
2006-10-27
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of desorbed products during organic polymer thin film etching by plasma beam irradiation
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/24/6/10.1116/1.2364000
10.1116/1.2364000
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