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Thinning of N-face GaN samples by inductively coupled plasma etching and chemomechanical polishing
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10.1116/1.2433987
/content/avs/journal/jvsta/25/2/10.1116/1.2433987
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/2/10.1116/1.2433987
/content/avs/journal/jvsta/25/2/10.1116/1.2433987
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/content/avs/journal/jvsta/25/2/10.1116/1.2433987
2007-02-06
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thinning of N-face GaN (0001 ¯) samples by inductively coupled plasma etching and chemomechanical polishing
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/2/10.1116/1.2433987
10.1116/1.2433987
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