Dark conductivity and photoconductivity as a function of silane concentration.
Deposition rate as a function of silane concentration.
Raman spectra at 1.0%, 1.2%, and 1.4% silane concentrations.
Crystalline fraction measured at different silane concentrations.
FTIR spectra from films grown at 1.0% and 2.0% silane concentrations.
TEM bright-field image and selected area electron diffraction pattern for a film deposited at 1.2% silane concentration.
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