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Effects of deposition parameters on the structure of AlN coatings grown by reactive magnetron sputtering
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10.1116/1.2730513
/content/avs/journal/jvsta/25/3/10.1116/1.2730513
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/3/10.1116/1.2730513
/content/avs/journal/jvsta/25/3/10.1116/1.2730513
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/content/avs/journal/jvsta/25/3/10.1116/1.2730513
2007-04-20
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of deposition parameters on the structure of AlN coatings grown by reactive magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/3/10.1116/1.2730513
10.1116/1.2730513
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