(a) , , and transitional material (shaded) zones, position of the starting point and effect of flow variation in the space. (b) deposition rate (엯) and Raman crystallinity (●) when the hydrogen flow is decreased, while the silane flow rate and the pressure are kept constant.
Effect of a pressure increase on (a) and and (b) deposition rate (엯) and Raman crystallinity (●) with constant silane and hydrogen flow rates of 80 and , respectively.
Multistep experimental results following iso- and iso- curves.
Flow diagram for deposition optimization.
Article metrics loading...
Full text loading...