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Adhesion properties of polymer/silicon interfaces for biological micro-/nanoelectromechanical systems applications
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10.1116/1.2435390
/content/avs/journal/jvsta/25/4/10.1116/1.2435390
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/4/10.1116/1.2435390
/content/avs/journal/jvsta/25/4/10.1116/1.2435390
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/content/avs/journal/jvsta/25/4/10.1116/1.2435390
2007-07-03
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Adhesion properties of polymer/silicon interfaces for biological micro-/nanoelectromechanical systems applications
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/4/10.1116/1.2435390
10.1116/1.2435390
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