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Capacitive discharges driven by combined dc/rf sources
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10.1116/1.2771561
/content/avs/journal/jvsta/25/5/10.1116/1.2771561
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/5/10.1116/1.2771561
/content/avs/journal/jvsta/25/5/10.1116/1.2771561
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/content/avs/journal/jvsta/25/5/10.1116/1.2771561
2007-08-21
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Capacitive discharges driven by combined dc/rf sources
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/5/10.1116/1.2771561
10.1116/1.2771561
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