Effect of growth conditions on the structure and properties of tungsten films prepared using a thermal evaporation process
X-ray diffraction spectra of thermally evaporated tungsten films.
SEM images of and films obtained at 0% . Surface morphologies of (A) and (B) , and cross sectional images of (C) and (D) films. -tungsten film image magnifications were due to surface morphology and column structure.
(A) SEM image showing the back surface of an film removed from the substrate. (B) XRD spectra of the back surface.
(A) TEM cross sectional image of an -tungsten film obtained at 1% methane concentration. (B) Nucleation of tungsten on the carbon layer. The insert in (B) shows that the tungsten is polycrystalline.
Field emission test results of (A) -tungsten and (B) -tungsten films.
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