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Effect of growth conditions on the structure and properties of tungsten films prepared using a thermal evaporation process
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10.1116/1.2790913
/content/avs/journal/jvsta/25/6/10.1116/1.2790913
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/6/10.1116/1.2790913
/content/avs/journal/jvsta/25/6/10.1116/1.2790913
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/content/avs/journal/jvsta/25/6/10.1116/1.2790913
2007-10-02
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of growth conditions on the structure and properties of tungsten films prepared using a thermal evaporation process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/6/10.1116/1.2790913
10.1116/1.2790913
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