1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Effect of growth conditions on the structure and properties of tungsten films prepared using a thermal evaporation process
Rent:
Rent this article for
USD
10.1116/1.2790913
/content/avs/journal/jvsta/25/6/10.1116/1.2790913
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/6/10.1116/1.2790913
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffraction spectra of thermally evaporated tungsten films.

Image of FIG. 2.
FIG. 2.

SEM images of and films obtained at 0% . Surface morphologies of (A) and (B) , and cross sectional images of (C) and (D) films. -tungsten film image magnifications were due to surface morphology and column structure.

Image of FIG. 3.
FIG. 3.

(A) SEM image showing the back surface of an film removed from the substrate. (B) XRD spectra of the back surface.

Image of FIG. 4.
FIG. 4.

(A) TEM cross sectional image of an -tungsten film obtained at 1% methane concentration. (B) Nucleation of tungsten on the carbon layer. The insert in (B) shows that the tungsten is polycrystalline.

Image of FIG. 5.
FIG. 5.

Field emission test results of (A) -tungsten and (B) -tungsten films.

Loading

Article metrics loading...

/content/avs/journal/jvsta/25/6/10.1116/1.2790913
2007-10-02
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of growth conditions on the structure and properties of tungsten films prepared using a thermal evaporation process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/25/6/10.1116/1.2790913
10.1116/1.2790913
SEARCH_EXPAND_ITEM