1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Crystallographic texture, morphology, optical, and microwave dielectric properties of dc magnetron sputtered nanostructured zirconia thin films
Rent:
Rent this article for
USD
10.1116/1.2827492
/content/avs/journal/jvsta/26/2/10.1116/1.2827492
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/2/10.1116/1.2827492

Figures

Image of FIG. 1.
FIG. 1.

Characteristics of films. (a) At different OMPs in the sputtering atmosphere. (b) At different working pressures and 100% OMP.

Image of FIG. 2.
FIG. 2.

X-ray diffraction patterns of the films deposited on glass (a) at (I) 20%, (II) 40%, (III) 60%, (IV) 80%, and (V) 100% OMP. (b) On quartz at (I) 20%, (II) 40%, (III) 60%, (IV) 80%, and (V) 100% OMP.

Image of FIG. 3.
FIG. 3.

Variation in crystallite size of the films as a function of OMP on glass and quartz at a pressure of .

Image of FIG. 4.
FIG. 4.

Strain of the films deposited on glass and quartz as a function of OMP.

Image of FIG. 5.
FIG. 5.

DFM images of the films deposited on glass at (a) 20%, (b) 40%, (c) 80%, and (d) 100% OMP at a pressure of .

Image of FIG. 6.
FIG. 6.

DFM image of the films deposited on quartz at (a) 20%, (b) 40%, (c) 80%, and (d) 100% OMP at a pressure of .

Image of FIG. 7.
FIG. 7.

Measured spectral transmission curves of films deposited at 30%, 50%, and 100% of OMP at a pressure of .

Image of FIG. 8.
FIG. 8.

Variation in refractive index of the films as a function of OMP on glass and quartz at a pressure of and at a wavelength of .

Image of FIG. 9.
FIG. 9.

(a) Variation in band gap and crystallite size of the films as a function of OMP on quartz at a pressure of . (b) Variation in band gap as a function crystallite size deposited on quartz at a pressure of .

Image of FIG. 10.
FIG. 10.

Variation in dielectric constant and dielectric loss for films deposited at a pressure of on glass as a function of OMP at three frequencies in the band.

Image of FIG. 11.
FIG. 11.

Variation in dielectric constant and dielectric loss deposited on quartz as a function of oxygen mixing percentage at three frequencies in band.

Image of FIG. 12.
FIG. 12.

Variation in dielectric constant and dielectric loss (a) as a function of crystallite size and (b) band gap for the films deposited on quartz measured at .

Tables

Generic image for table
TABLE I.

Strain of the films deposited on glass.

Generic image for table
TABLE II.

Strain of the films deposited on quartz.

Loading

Article metrics loading...

/content/avs/journal/jvsta/26/2/10.1116/1.2827492
2008-01-17
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Crystallographic texture, morphology, optical, and microwave dielectric properties of dc magnetron sputtered nanostructured zirconia thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/2/10.1116/1.2827492
10.1116/1.2827492
SEARCH_EXPAND_ITEM