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Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering
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10.1116/1.2839855
/content/avs/journal/jvsta/26/2/10.1116/1.2839855
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/2/10.1116/1.2839855

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagrams: (a) arrangement of the substrate holder, cathodes, and the magnets in an HTC 1000–4/ABS PVD coater17 and (b) CrN/NbN coating layer scheme.1

Image of FIG. 2.
FIG. 2.

Mass and energy spectra of (a) HIPIMS of Cr and (b) conventional dc sputtering of Cr in Ar and atmosphere as used to deposit the CrN/NbN nanolayer coating.

Image of FIG. 3.
FIG. 3.

X-ray diffraction patterns of the CrN/NbN coating deposited by the H-H and the H-U technique.

Image of FIG. 4.
FIG. 4.

TEM micrographs of the nanoscale multilayer structure evident for the CrN/NbN coatings deposited by (a) H-H technique, (b) H-U technique, and (c) ABS technique.

Image of FIG. 5.
FIG. 5.

TEM micrographs showing microstructure details: (a) defect-free H-H coating and (b) H-U coating evident with intercolumnar voids (highlighted with white markers).

Image of FIG. 6.
FIG. 6.

Microstructure of the coatings showing the grain column topography: TEM cross-sectional micrographs showing the grain columns tops of the (a) H-H and the (b) H-U coating. SEM plan view micrographs for the (c) H-H and the (d) H-U coatings.

Image of FIG. 7.
FIG. 7.

SEM image of the wear track of the H-H coating. (a) Lower magnification image of the wear track in general. (b) Higher magnification image of the selected area of the wear track shown in the bracket in (a).

Image of FIG. 8.
FIG. 8.

Graph of friction coefficient against sliding distance under dry sliding conditions and counterpart: (a) H-H coatings and (b) H-U coatings.

Image of FIG. 9.
FIG. 9.

Potentiodynamic polarization curves for the H-H, H-U, ABS coating, and uncoated SS polarized from to in a NaCl solution aerated for 25 min.

Tables

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TABLE I.

Process scheme of different techniques used to deposit nanoscale multilayered CrN/NbN PVD coatings.

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TABLE II.

Characterization results of nanoscale multilayer CrN/NbN PVD coatings deposited by three techniques.

Generic image for table
TABLE III.

Comparative values of surface roughness, friction coefficient, and sliding wear coefficient of CrN/NbN coatings produced by H-H, H-U, and ABS techniques.

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/content/avs/journal/jvsta/26/2/10.1116/1.2839855
2008-02-20
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/2/10.1116/1.2839855
10.1116/1.2839855
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