Experimental study of multilayer mirrors for the nitrogen -emission line
Scheme of the magnetron sputtering deposition chamber.
GIXR measurements (dots) and fitting results (lines) of samples A, B, and C.
AFM images of multilayers A, B, C, and E, with the corresponding surface roughness.
Measured soft x-ray reflectivity of the multilayers A (squares), B (dots), and C (triangles) around the nitrogen -emission line at grazing angles of 21.7°, 23.9°, and 23.4°, respectively.
GIXR measurements (dots) and fitting results (lines) of samples B and E.
Measured soft x-ray reflectivity of the multilayers B (squares), D (dots), and E (triangles) around the nitrogen -emission line at grazing angles of 23.9°, 22.7°, and 22.3°, respectively.
Overview of the multilayers. represents the spacing of the multilayer, the number of bilayers, the pressure of argon during the deposition process, the theoretical reflectivity of the multilayer assuming a perfect structure, the measured reflectivity of the multilayer, and the effective average interfacial roughness.
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