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Experimental study of multilayer mirrors for the nitrogen -emission line
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10.1116/1.2891248
/content/avs/journal/jvsta/26/3/10.1116/1.2891248
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/3/10.1116/1.2891248

Figures

Image of FIG. 1.
FIG. 1.

Scheme of the magnetron sputtering deposition chamber.

Image of FIG. 2.
FIG. 2.

GIXR measurements (dots) and fitting results (lines) of samples A, B, and C.

Image of FIG. 3.
FIG. 3.

AFM images of multilayers A, B, C, and E, with the corresponding surface roughness.

Image of FIG. 4.
FIG. 4.

Measured soft x-ray reflectivity of the multilayers A (squares), B (dots), and C (triangles) around the nitrogen -emission line at grazing angles of 21.7°, 23.9°, and 23.4°, respectively.

Image of FIG. 5.
FIG. 5.

GIXR measurements (dots) and fitting results (lines) of samples B and E.

Image of FIG. 6.
FIG. 6.

Measured soft x-ray reflectivity of the multilayers B (squares), D (dots), and E (triangles) around the nitrogen -emission line at grazing angles of 23.9°, 22.7°, and 22.3°, respectively.

Tables

Generic image for table
TABLE I.

Overview of the multilayers. represents the spacing of the multilayer, the number of bilayers, the pressure of argon during the deposition process, the theoretical reflectivity of the multilayer assuming a perfect structure, the measured reflectivity of the multilayer, and the effective average interfacial roughness.

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/content/avs/journal/jvsta/26/3/10.1116/1.2891248
2008-03-26
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental study of Cr∕Sc multilayer mirrors for the nitrogen Kα-emission line
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/3/10.1116/1.2891248
10.1116/1.2891248
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