1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Ion beam deposition of tantalum pentoxide thin film at room temperature
Rent:
Rent this article for
USD
10.1116/1.2832407
/content/avs/journal/jvsta/26/4/10.1116/1.2832407
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/4/10.1116/1.2832407

Figures

Image of FIG. 1.
FIG. 1.

Schematic drawing of the ion beam setup.

Image of FIG. 2.
FIG. 2.

SEM image of a metallic Ta film deposited with at and an Ar pressure of .

Image of FIG. 3.
FIG. 3.

Composition as a function of the oxygen partial pressure. Two sets of data are shown: after 3 and of sputtering, respectively. The two horizontal lines represent the stoichiometry of .

Image of FIG. 4.
FIG. 4.

AFM measurement of a film obtained with an oxygen partial pressure of .

Image of FIG. 5.
FIG. 5.

FTIR spectra of a series of films with the oxygen partial pressure as parameter. The spectra have been offset along the axis for clarity. The peaks labeled (1)–(4) are discussed in the text. The vertical line is situated at .

Image of FIG. 6.
FIG. 6.

Growth rate and refractive index as a function of the oxygen partial pressure.

Image of FIG. 7.
FIG. 7.

UV-VIS transmission spectra of a series of samples for which the oxygen partial pressure has been varied. The oxygen content of the samples is given also. Additionally, the transmission of a bare glass substrate is shown.

Tables

Generic image for table
TABLE I.

Deposition parameters used throughout this investigation.

Loading

Article metrics loading...

/content/avs/journal/jvsta/26/4/10.1116/1.2832407
2008-07-01
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion beam deposition of tantalum pentoxide thin film at room temperature
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/4/10.1116/1.2832407
10.1116/1.2832407
SEARCH_EXPAND_ITEM