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Ion beam deposition of tantalum pentoxide thin film at room temperature
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10.1116/1.2832407
/content/avs/journal/jvsta/26/4/10.1116/1.2832407
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/4/10.1116/1.2832407
/content/avs/journal/jvsta/26/4/10.1116/1.2832407
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/content/avs/journal/jvsta/26/4/10.1116/1.2832407
2008-07-01
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion beam deposition of tantalum pentoxide thin film at room temperature
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/4/10.1116/1.2832407
10.1116/1.2832407
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