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The effectiveness of HCl and HF cleaning of surface
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10.1116/1.2966428
/content/avs/journal/jvsta/26/5/10.1116/1.2966428
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/5/10.1116/1.2966428
/content/avs/journal/jvsta/26/5/10.1116/1.2966428
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/content/avs/journal/jvsta/26/5/10.1116/1.2966428
2008-08-20
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effectiveness of HCl and HF cleaning of Si0.85Ge0.15 surface
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/5/10.1116/1.2966428
10.1116/1.2966428
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