1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The effectiveness of HCl and HF cleaning of surface
Rent:
Rent this article for
USD
10.1116/1.2966428
/content/avs/journal/jvsta/26/5/10.1116/1.2966428
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/5/10.1116/1.2966428
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) and (b) spectra for at . Top: as received; middle: etched in 10% HCl for 10 min; bottom: etched in 2% HF for 2 min. Spectra are normalized by the bulk peak intensity to show the line shape change.

Image of FIG. 2.
FIG. 2.

spectra for etched in 2% HF for 2 min with numerical fitting. (a) , normal emission angle; (b) , emission angle; (c) , normal emission angle. Ge monohydride, dihydride, and trihydride are labeled as , , and , respectively.

Image of FIG. 3.
FIG. 3.

(a) Ratios of the intensities for , , and peaks over bulk peak at different emission angles. (b) The calculated surface coverages of , , and at different emission angles.

Loading

Article metrics loading...

/content/avs/journal/jvsta/26/5/10.1116/1.2966428
2008-08-20
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effectiveness of HCl and HF cleaning of Si0.85Ge0.15 surface
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/26/5/10.1116/1.2966428
10.1116/1.2966428
SEARCH_EXPAND_ITEM