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Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system
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10.1116/1.3106612
/content/avs/journal/jvsta/27/3/10.1116/1.3106612
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3106612
/content/avs/journal/jvsta/27/3/10.1116/1.3106612
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/content/avs/journal/jvsta/27/3/10.1116/1.3106612
2009-03-30
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3106612
10.1116/1.3106612
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