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Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system
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10.1116/1.3106612
/content/avs/journal/jvsta/27/3/10.1116/1.3106612
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3106612

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of experimental apparatus.

Image of FIG. 2.
FIG. 2.

Pressure dependence and concentration dependence of the synthetic impedance under several discharge conditions. The total flow rate of the gas mixture of and the rf power supply output were and , respectively. The concentration was set to the triple value of the concentration. The error ranges of and were approximately 0.05 and , respectively.

Image of FIG. 3.
FIG. 3.

concentration dependence of the maximum pressure where the electrical discharge can be maintained. The total flow rate of the gas mixture of and the rf power supply output were and , respectively. The concentration was set to the triple value of the concentration. The error ranges of the plots were less than .

Image of FIG. 4.
FIG. 4.

Pressure dependence of emissions exhausted from cylindrical ICP chamber. The flow rate, the flow rate, the Ar flow rate, and the rf power supply output were , , , and , respectively.

Image of FIG. 5.
FIG. 5.

Pressure dependence of removal efficiency. The pressure, the flow rate, the flow rate, the Ar flow rate, and the rf power supply output were , , , , and , respectively. The error ranges of the plots were less than 0.5%.

Image of FIG. 6.
FIG. 6.

Flow velocity dependence of removal efficiency. The pressure, the flow rate, the total flow rate, and the rf power supply output were 0.13 or , , , and , respectively.

Image of FIG. 7.
FIG. 7.

flow rate dependence of removal efficiency. The pressure, the flow rate, the total flow rate, and the rf power supply output were 0.13 or , , , and , respectively. The error ranges of the plots were less than 0.5%.

Tables

Generic image for table
TABLE I.

Specifications of cylindrical ICP chamber.

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/content/avs/journal/jvsta/27/3/10.1116/1.3106612
2009-03-30
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3106612
10.1116/1.3106612
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