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Sputter-deposited thin films: Effect of substrate and optical properties
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10.1116/1.3117243
/content/avs/journal/jvsta/27/3/10.1116/1.3117243
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3117243
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the prism-film coupler. The incident focused laser beam is totally reflected at the prism base. Wave guided modes in the optical thin film are excited selectively at certain angles of incidence, . The -lines appearing on the detector screen are used to estimate numerically the thickness and refractive index of the optical thin film.

Image of FIG. 2.
FIG. 2.

scans of a PLZT/SRO bilayer grown on (a) and (b) MgO(001). The diffractograms show purely (001)-oriented monocrystalline PLZT and (110)-oriented SRO on both substrates. The insets show the rocking curves for the PLZT(001) diffraction, with a FWHM of and for films grown on and MgO, respectively.

Image of FIG. 3.
FIG. 3.

-scans of a PLZT/SRO bilayer grown on (a) and (b) MgO. The observed fourfold symmetry verifies in-plane alignment of the PLZT and SRO layers.

Image of FIG. 4.
FIG. 4.

Reciprocal space map of a PLZT/SRO bilayer on . The PLZT(103) peak is shifted by relative to that of the orthorhombic SRO(332) and Bragg peaks.

Image of FIG. 5.
FIG. 5.

(a) hysteresis loops and (b) frequency responses of the dielectric constant (filled symbols) and the loss tangent tan (open symbols) for PLZT thin films grown on and SRO/MgO. The inset in (a) shows the measured curve for the sample.

Image of FIG. 6.
FIG. 6.

Measured interdependence of the laser beam angle of incidence and the mode order for rutile prism coupling measurements (cf. Fig. 1 ) of a PLZT thin film on MgO for TE and TM polarized light. The best fit for TE (dashed line) and TM polarization (solid line) suggests a refractive index and a film thickness for the actual wavelength of .

Image of FIG. 7.
FIG. 7.

(a) Spectrometric ellipsometry data with best fit from model calculations for a PLZT thin film on MgO. (b) Calculated dispersion of the refractive index for and PLZT/MgO.

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/content/avs/journal/jvsta/27/3/10.1116/1.3117243
2009-04-27
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sputter-deposited (Pb,La)(Zr,Ti)O3 thin films: Effect of substrate and optical properties
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/3/10.1116/1.3117243
10.1116/1.3117243
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